JPH0185907U - - Google Patents

Info

Publication number
JPH0185907U
JPH0185907U JP18187887U JP18187887U JPH0185907U JP H0185907 U JPH0185907 U JP H0185907U JP 18187887 U JP18187887 U JP 18187887U JP 18187887 U JP18187887 U JP 18187887U JP H0185907 U JPH0185907 U JP H0185907U
Authority
JP
Japan
Prior art keywords
cleaning
cap
cleaning liquid
view
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18187887U
Other languages
English (en)
Japanese (ja)
Other versions
JP2531177Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987181878U priority Critical patent/JP2531177Y2/ja
Publication of JPH0185907U publication Critical patent/JPH0185907U/ja
Application granted granted Critical
Publication of JP2531177Y2 publication Critical patent/JP2531177Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
JP1987181878U 1987-11-28 1987-11-28 クリーニングカセット Expired - Lifetime JP2531177Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181878U JP2531177Y2 (ja) 1987-11-28 1987-11-28 クリーニングカセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181878U JP2531177Y2 (ja) 1987-11-28 1987-11-28 クリーニングカセット

Publications (2)

Publication Number Publication Date
JPH0185907U true JPH0185907U (en]) 1989-06-07
JP2531177Y2 JP2531177Y2 (ja) 1997-04-02

Family

ID=31473342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181878U Expired - Lifetime JP2531177Y2 (ja) 1987-11-28 1987-11-28 クリーニングカセット

Country Status (1)

Country Link
JP (1) JP2531177Y2 (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936021U (ja) * 1982-08-27 1984-03-06 九州日立マクセル株式会社 カセツト式クリ−ナ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936021U (ja) * 1982-08-27 1984-03-06 九州日立マクセル株式会社 カセツト式クリ−ナ

Also Published As

Publication number Publication date
JP2531177Y2 (ja) 1997-04-02

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